We offer a bespoke fabrication service for custom silicon-on-insulator (SOI) nano-electromechanical systems (NEMS) and micro-electromechanical systems (MEMS) devices. Our service provides an attractive option for a wide range of users thanks to its unique collection of features:
- dicing-free process technology
- proven effectiveness across various designs
- cost-effectiveness
- flexible design rules
The service uses unique process technology, which emphasises a dicing-free approach. This is significant as it streamlines the manufacturing process enhancing efficiency and yield.
Our service has proven effectiveness across diverse design architectures. It is robust, adaptable and reliable for a wide range of applications. By validating the process flow on unrelated designs, we have established a track record of versatility and effectiveness. This is essential for potential users who seek a reliable fabrication platform for their varied NEMS/MEMS designs.
We provide an affordable fabrication option that is attractive for both academic and industrial users.
We offer flexible design rules, which is vital in a field where customisation and specific design requirements are common. By accommodating such specifications, we can cater to a broader user base. This includes researchers and developers who may have unique or unconventional design criteria.
This service represents a significant advancement for the fabrication of custom SOI NEMS/MEMS devices.
Contact us
For more information on this service, contact Ibrahim Sari by email: Ibrahim.Sari@soton.ac.uk