Quantum, Light and Matter Group About us Research themes and groups Our facilities Our people Projects Publications Quantum, Light and Matter Group Our facilities Get to know our facilities, including equipment lists and technical specifications. Focused ion beam facility This facility supports research in nanoelectronics, nanophotonics, silicon photonics and quantum devices research. Nanofabrication cleanrooms The nanofabrication cleanrooms houses a fully featured suite of semiconductor processing tools as well as a planar fabrication laboratory.
