Module overview
The aim of this module is to provide an overview of a range of microscale and nanoscale systems and devices, including sensors, actuators, and transducers. The module consists of practical works on micro and nanosystems, involving construction and characterisation with a variety of methodologies, and is supported by lectures. The assessment is in the form of two courseworks.
Aims and Objectives
Learning Outcomes
Subject Specific Intellectual and Research Skills
Having successfully completed this module you will be able to:
- Define characterisation strategies for such systems
- Explaining the working principle of several classes of micro and nanosystems
Knowledge and Understanding
Having successfully completed this module, you will be able to demonstrate knowledge and understanding of:
- Electrical characterisation of such systems
- Key features of a range of micro and nanosystems
Subject Specific Practical Skills
Having successfully completed this module you will be able to:
- Characterise a nanoresonator system
- Package and evaluate a piezoelectric sensor
Transferable and Generic Skills
Having successfully completed this module you will be able to:
- Structure and write technical reports
Syllabus
Piezo/capacitive systems
- Thick-film and piezoelectric systems
- Sensor actuators
- Piezoresistive and Capacitive sensing
- Pressure sensors
- Accelerometers
- Gyroscopes
Nanoscale systems
- Nano Electro Mechanical Systems
- Nanotube and nanowire devices
- Nano resonators
Laboratory
- Packaging and characterisation of piezoelectric sensor
- Nanoresonator characterisation
Learning and Teaching
Teaching and learning methods
Note that a laboratory report will not be marked if the student has not attended the associated laboratory sessions.
| Type | Hours |
|---|---|
| Preparation for scheduled sessions | 15 |
| Completion of assessment task | 50 |
| Tutorial | 9 |
| Follow-up work | 15 |
| Lecture | 18 |
| Wider reading or practice | 25 |
| Supervised time in studio/workshop | 18 |
| Total study time | 150 |
Resources & Reading list
General Resources
Comprehensive lecture notes will be provided.
Internet Resources
Journal of Microelectromechanical Systems.
Sensors and Actuators A: Physical.
Textbooks
Gaura, E (2006). Smart MEMS and Sensor Systems. Imperial College Press.
Hector de Los Santos (2004). Introduction to Microelectromechanical Microwave Systems. Artech House, Inc..
Kovacs GTA (1998). Micromachined Transducers Sourcebook. McGraw-Hill.
Senturia, S.D (2001). Microsystem Design. Kluwer.
Maluf N and Williams K (2004). An Introduction to Microelectromechanical Systems Engineering. Artech House Mems Library.
Khanna VK (2011). Nanosensors: physical, chemical, and biological. CRC Press.
Assessment
Assessment strategy
A lab report will not be marked if the student has not attended the corresponding lab sessions.
Laboratory sessions are scheduled in the relevant laboratory facilities in ECS.
Length of each session: 3 hours for Microsystems/MEMS, 2 hours for Nanosystems/NEMS.
Number of sessions completed by each student: 5
Max number of students per session: 18 for Micro and 2 for Nano
Demonstrator:student ratio: 1:9 for Micro and 1:2 for Nano
Preferred teaching weeks: 12
Summative
This is how we’ll formally assess what you have learned in this module.
| Method | Percentage contribution |
|---|---|
| Coursework and lab reports | 50% |
| Coursework and lab reports | 50% |
Referral
This is how we’ll assess you if you don’t meet the criteria to pass this module.
| Method | Percentage contribution |
|---|---|
| Set Task | 100% |
Repeat
An internal repeat is where you take all of your modules again, including any you passed. An external repeat is where you only re-take the modules you failed.
| Method | Percentage contribution |
|---|---|
| Set Task | 100% |
Repeat Information
Repeat type: Internal & External