| Rule | Description | Lambda | ||
|---|---|---|---|---|
| SCMOS | SUBM | DEEP | ||
| 4.1 | Minimum select spacing to channel of transistor to ensure adequate source/drain width | 3 | 3 | 3 |
| 4.2 | Minimum select overlap of active | 2 | 2 | 2 |
| 4.3 | Minimum select overlap of contact | 1 | 1 | 1.5 |
| 4.4 |
Minimum select width and spacing (Note: P-select and N-select may be coincident, but must not overlap) (not illustrated) |
2 | 2 | 4 |